Integrated SMD pressure / flow / temperature multisensor for compressed air in LTCC technology: Thermal flow sensor

In this work, we present and analyse the flow-sensing part of a recently-developed multisensor in LTCC (lowtemperature co-fired ceramic) technology; this device integrates flow / pressure / temperature sensing and is designed for diagnostics monitoring of standard industrial compressed air circuits and devices such as valves and actuators. In this prototype, flow is sensed using the constant-temperature anemometric principle, with temperaturesensing active and reference thermistors placed in the fluidic channel integrated within the LTCC structure. The LTCC bridge structuration technology and electronics are analysed, and possible improvements in fabrication yield and efficiency outlined.